Field-Emission Scanning Electron Microscopy (FE-SEM)

Scientists in Charge

Dr. Pilar Aranda (Senior Scientist)

Dr. Miguel A. Camblor  (Research Professor)

Technician

Ismael Ballesteros (permanent staff)

Contact

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+34 913349000 ext. 437386
+34 91766520 (direct number)

Location

Lab S37 (basement)

Measurements

• High-resolution images with surface topography information.
• Quantitative chemical microanalysis by Energy Dispersive Spectroscopy (EDS). Mapping

Equipment

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• FEI Nova NanoSEM 230 microscope with a Schottky field-emission gun that allows visualization of samples at high (HV) and low (LV) vacuum (< 200 Pa) at variable potential (50 V to 30 kV) and with the possibility of decelerating the electron beam. Previous metalization is not required even for non-conductive samples using the low-vacuum option. The equipment incorporates several detectors: secondary electrons (SE) Everhart-Thornley for HV (SED), low vacuum SE (LVD), through the lens SE (TLD), backscatter electrons (BSE), through the lens (TLD-BSE), ultrahigh resolution low vacuum SED (Helix) as well as a new generation detector for high contrast imaging at low potentials in both HV and LV combining SE and BSE (vCD).
• Quantitative chemical analysis with a new generation EDX detector (EDAX Genesis XM2i) that allows identification of elements with atomic number ≥ 5 (Boro) and resolution till 133 eV. Imaging by element is also possible (chemical mapping).
• There are sample holders of different kinds, including special ones for cross-sectional views.

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Allowed samples

Any kind of samples of a size small enough to enter into the microscope chamber (<10cm). The samples must be and remain completely dry and must be stable under the electron beam. Typically, no metallization is required if working at low voltage with the vCD detector.

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