Organization
Support Laboratories

ICMM-CSIC

Clean Room

 

Scientists in charge

A. de Andrés, Álvaro Blanco and M. Lourdes Calzada

 

Technician

Álvaro García


Email

sala.blanca@icmm.csic.es

 

Telephone

+34 913349000 x. 011

 

Equipments

  • UV photolithography with maximum resolution of 0.8 um
  • Globe box with four gloves and humidity and oxigen control until 1 ppm and integrated spin coating
  • Metal deposition system by evaporation
  • Metal deposition system by sputtering with magnetron
  • Spin coating
  • Flowlan for chemichals manipulation

 

Description

Class 10000 clean room

 

Timetable

09:00 - 17:00

 

Tariffs

Tariff A- Users ICMM

Tariff B - OPIs, Public Universities and IMDEA

Tariff C - Enterprises

Tariff D - Other Institutes of CSIC


Tariffs A B C D
Clean Room (€/h) 5,00 € 6,50 € 15,00 € 5,00 €
Safety gloves (€/h) 3,00 € 4,00 € 9,00 € 3,00 €
Photolithography (€/h) 4,00 € 5,50 € 12,00 € 4,00 €
Sputtering (€ process) 20,00 € 26,00 € 60,00 € 20,00 €
Electron beam (€ process) 20,00 € 26,00 € 60,00 € 20,00 €



Clean Room Service Norms

 

Mask available for Photolithography

 

 

Application form  LIMS

 

 

       

ICMM-2017 - Sor Juana Inés de la Cruz, 3, Cantoblanco, 28049 Madrid, Spain. Tel: +34 91 334 9000. Fax: +34 91 372 0623. info@icmm.csic.es