Scanning probe lithography laboratory Oxidation scanning probe lithography Parallel nanolithography Electrical characterization of nanodevices Rapid thermal processing Optical microscope Advanced dynamic atomic force microscopy laboratory Bimodal and Multifrequency AFM Cypher AFM Multimode AFM High-resolution imaging in liquid Cypher AFM Agilent AFM Force spectroscopy Multimode AFM JPK Simulations laboratory Chemical room Cleanroom Photolithography Cell Culture Room