Characterization of thin film growth and processing by in-situ time-resolved GISAXS

The increase in hard X-ray brightness in third generation synchrotron sources together with the development of fast two-dimensional X-ray detectors has enabled to perform time-resolved X-ray scattering experiments in the millisecond regime. Thus, the evolution of the thin film morphology at the nanoscale can be continuously monitored employing Grazing Incidence Small-Angle X-ray Scattering (GISAXS), either during thin film growth or processing. In this chapter, the current trends of time-resolved GISAXS studies are reviewed. After a brief introduction to the technique, we present exemplary results of metallic and organic thin film preparation using vacuum technologies, wet deposition of polymer thin films and self-assembly of colloidal thin films, as well as examples of thin film modification in, e.g., microfluidic channels and within working devices.

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This book chapter review has been published in “Grazing Incidence Small Angle X-ray Scattering as a Tool for In-situ Time Resolved Experiments”, G. Santoro and S. Yu, pp. 29-60 in “X-ray Scattering”, Ed. A. Ares. InTech, 2017.

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