ASOCIACION ESPAñOLA DEL VACIO Y SUS APLICACIONES
INSTITUTO DE CIENCIA DE MATERIALES DE MADRID - CSIC

CSIC

ASEVA SUMMER SCHOOL-EDITION 2003

WS-14: REACTIVE PLASMAS

TOPIC: PHYSICAL AND CHEMICAL PROCESSES IN REACTIVE HYDROCARBON PLASMAS IN CONTACT WITH SURFACES

AIM

The main aim of the workshop is to bridge the gap between the diagnostics and modeling of reactive plasmas and their specific interaction with the surrounding surfaces. The focus will be on the material system carbon, hydrogen, and nitrogen. Topics that shall be covered in the workshop are: in-situ diagnostics and modeling of low-temperature, reactive bulk plasmas (in particular quantification of radicals), plasma chemistry in reactive plasmas, fluxes of reactive species to the surfaces, and in-situ diagnostics and modeling of plasma surface interaction processes.

Ávila, Spain. July 22-25, 2003

VENUE: HOTEL REINA ISABEL